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de Bree, H.E. and Druyvesteyn, W.F. and Berenschot, J.W. and Elwenspoek, M.C. (1999) Three-dimensional sound intensity measurements using microflown particle velocity sensors. In: Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 17-21 Jan 1999, Orlando, FL, USA. pp. 124-129. IEEE Computer Society. ISBN 0-7803-5194-0
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Official URL: http://dx.doi.org/10.1109/MEMSYS.1999.746785
This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.
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