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Wiegerink, R.J. and Floris, J. and Jaganatharaja, R.K. and Izadi, N. and Lammerink, T.S.J. and Krijnen, G.J.M.
(2007)
Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets.
In: Sensors, IEEE 2007, 28-31 October, Atlanta, USA.
pp. 1073-1076.
IEEE Computer Society.
ISSN 1930-0395
ISBN 978-1-4244-1262-4
Full text available as:
Official URL: http://dx.doi.org/10.1109/ICSENS.2007.4388591  AbstractIn this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.
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