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11692 Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels

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Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on, 21-25 January, Kobe, Japan. pp. 123-126. IEEE Computer Society. ISBN 1-4244-0951-9

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Official URL: http://dx.doi.org/10.1109/MEMSYS.2007.4433031

Abstract

A calorimetric miniaturized flow sensor was realized with
a linear sensor response measured for DI water flow from
40 nl⋅min-1 up to 300 nl⋅min-1. A versatile technological
concept is used to realize a sensor with thermally-isolated
freely-suspended silicon-nitride microchannels directly
below the substrate surface. The microchannel concept
allows for the planar integration of sensor structures in
close proximity to the fluid. Chemical-resistant fluidic
connections can be made directly on top of the
microchannels, without introducing large dead-volumes.
The realized flow sensor consists of a microchannel with
low hydraulic resistance and small total fluid volume.

Item Type:	Conference or Workshop Paper (Full Paper, Other)
Research Group:	EWI-TST: Transducers Science and Technology
Research Program:	MESA-General
Research Project:	Low drift micro-flowsensors
ID Code:	11692
Status:	Published
Deposited On:	13 January 2008
Refereed:	Yes
International:	Yes
More Information:	statistics metis

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