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11425 Low-loss rib waveguides in Al₂O₃ layers for active integrated optical devices

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Bradley, J.D.B. and Ay, F. and Wörhoff, K. and Pollnau, M. (2007) Low-loss rib waveguides in Al₂O₃ layers for active integrated optical devices In: Digest of the Conference on Lasers and Electro-Optics Europe (CLEO/Europe-IQEC 2007), 17-22 June 2007, Munich, Germany. CE7-6. European Physical Society. ISBN 1-42440931-4

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Official URL: http://dx.doi.org/10.1109/CLEOE-IQEC.2007.4386203

Abstract

A method for deposition of aluminum oxide layers with low optical loss (0.11 dB/cm at 1523 nm) has been developed. Low-loss rib waveguides have been fabricated in such layers using a dry-etching process.

Item Type:	Conference or Workshop Paper (Abstract, Talk)
Research Group:	EWI-IOMS: Integrated Optical MicroSystems
Research Program:	MESA-General
Research Project:	PI-OXIDE: Photonic integrated devices in activated amorphous and crystalline oxides
ID Code:	11425
Status:	Published
Deposited On:	29 January 2008
Refereed:	Yes
International:	Yes
More Information:	statistics metis

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